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3D packaging technology is the development direction of chip packaging, but even if it is tested before packaging, there will still be defects after packaging. If the packaged chip can be separated into single chips, the Die with OK function can be repackaged and used. Reduce scrap and save costs. The picture below shows an 8-layer packaged DRAM, which is pasted together by 8 single-layer Dies. After packaging, one or more layers of Dies were found to be defective. It is necessary to separate them without damage and recycle the good Dies. , because the adhesive layer is very tight, it is difficult for general medicaments to enter the joint surface, resulting in very difficult separation.
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Put the wafer into the beaker, then add ACHM04-H1 agent and heat it to 160-170 degrees. At this time, the agent starts to boil. After keeping the temperature for 1 hour, it is found that the gap at the middle bonding position of the wafer has begun to expand slightly
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Continue heating for about 4 hours and find that the wafer has begun to separate into multiple pieces. At this time, you can suspend heating to see if it has been completely separated.
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Continue to heat for about 5 hours and find that the 8 wafers have been completely separated. At this time, stop heating, wait for the agent to cool to room temperature, then take it out, rinse off the surface agent with pure water, and dry it. If you switch to IPA to rinse, it can reduce the generation of water marks
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Conclusion: Using ACHM04-H1 can separate 3D packaged multilayer wafers without damaging the wafers